Product
Piezo-MEMS Foundry
Your Dedicated Partner for Piezo-MEMS Innovation
We provide comprehensive, end-to-end MEMS foundry solutions tailored to each customer's requirements, supporting every stage from process development to manufacturing.
Product detailsFoundry Service
Photolithography
| Equipment | Note |
|---|---|
| Spin Coater & Track System | Sample ~ 8 inch |
| Mask Aligner | Sample ~ 8 inch |
| Wet Station & Spin Dryer | |
| Plasma Asher & Cleaner | |
Oxidation
| Equipment | Note |
|---|---|
| PECVD | Poly Silicon, SiO₂ |
| Diffusion Furnace | 2~8 inch |
Metal Deposition
| Equipment | Note |
|---|---|
| E-beam Evaporator | 4~8 inch/Au, Cu, Ni, Al, etc. |
Etching
| Equipment | Note |
|---|---|
| DRIE & ICP Etcher | PZT, Si, Oxide & Metal film each |
Others
| Equipment | Note |
|---|---|
| Dicing Saw | |
