Product
Piezoelectric Thin Films
High Quality Piezoelectric Thin Film Coating Service
PZT and lead-free thin-film coating services with crystal orientation control and high uniformity. We also provide high-quality Pt-coated wafers with excellent surface uniformity for thin-film deposition and device fabrication.
Product detailsThin-film Specs
PZT & Lead-free Thin Film Coating Service
| Item | Value |
|---|---|
| Composition | Customers' preference (including dopants) |
| Target Thickness | 150 nm ~ 2 µm |
| Crystal orientation | Orientation control can be discussed based on customer requirements |
| Substrate size | Sample size ~ 8 inch |
| Standard substrate | Pt/Ti/SiO₂/Si, Pt/Ti on SOI wafer or other MEMS structured wafers |
| Data | Basic data and process flow chart provided |
Platinum Coated Si Wafer
| Item | Value |
|---|---|
| Target Thickness | 100 ~ 200 nm |
| Substrate size | Sample size ~ 8 inch |
| Standard substrate | SiO₂/Si Wafer |
| Data | Basic data and process flow chart provided |
